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ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - STI CMP: Exploration of a Colloidal Silica Based Slurry System
Song, Peter, Yaoying, Daisy Yao, Daw Sun, JackYear:
2011
Language:
english
DOI:
10.1149/1.3567569
File:
PDF, 209 KB
english, 2011