Structure and optical properties of HfO2 thin films on...

Optical Materials 2010 Vol. 32; Iss. 3

Structure and optical properties of HfO2 thin films on silicon after rapid thermal annealing

Tingting Tan, Zhengtang Liu, Hongcheng Lu, Wenting Liu, Hao Tian
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Volume:
32
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.optmat.2009.10.003
File:
PDF, 231 KB
english, 2010
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