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Optimization of SiGe Graded Buffer Defectivity and Throughput by Means of High Growth Temperature and Pre-Threaded Substrates
Erdtmann, Matthew, Currie, Matthew T., Woicik, Joseph C., Black, DavidVolume:
891
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0891-EE12-05
Date:
January, 2005
File:
PDF, 446 KB
english, 2005