Simultaneous Formation of n- and p-Type Ohmic Contacts to...

MRS Proceedings 2008 / 1 Vol. 1069

Simultaneous Formation of n- and p-Type Ohmic Contacts to 4H-SiC Using the Binary Ni/Al System

Ito, Kazuhiro, Onishi, Toshitake, Takeda, Hidehisa, Tsukimoto, Susumu, Konno, Mitsuru, Suzuki, Yuya, Murakami, Masanori
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Volume:
1069
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1069-D09-01
Date:
January, 2008
File:
PDF, 1.68 MB
english, 2008
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