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Properties of Al2O3 films prepared by argon ion assisted deposition
Al-Robaee, Mansour S., Krishna, Ghanashyam M., Subanna, G.N., Rao, Narasimha K., Mohan, S.Volume:
9
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1994.2688
Date:
October, 1994
File:
PDF, 1.32 MB
english, 1994