Narrowing sputtered nanoparticle size distributions
Kaatz, F.H., Chow, G.M., Edelstein, A.S.Volume:
8
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1993.0995
Date:
May, 1993
File:
PDF, 1.09 MB
english, 1993