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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Development of 300mm MOCVD HfSiOx Process
Shi, Xiaoping, Schaekers, Marc, Date, Lucien, Rothschild, Aude, Everaert, Jean-Luc, Van Elshocht, Sven, Rosseel, Erik, Kher, ShreyasVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355730
File:
PDF, 178 KB
english, 2006