On-line gas-phase optical diagnostics in plasma CVD deposition of carbon films
Fantoni, R., Giorgi, M., Moliterni, A.G.G., Berden, W.C.M., Lazic, V., Martini, O., Polla Mattiot, F.Volume:
7
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1992.1204
Date:
May, 1992
File:
PDF, 926 KB
english, 1992