Structural and Piezoresistive Characteristics of Amorphous...

MRS Proceedings 2012 / 1 Vol. 1433

Structural and Piezoresistive Characteristics of Amorphous Silicon Carbide Films Grown on AlN/Si Substrates

Fraga, Mariana A., Furlan, Humber, Pessoa, Rodrigo S., Rasia, Luiz A.
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Volume:
1433
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1148
Date:
January, 2012
File:
PDF, 394 KB
english, 2012
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