On determination of properties of ultrathin and very thin...

MRS Proceedings 2008 / 1 Vol. 1066

On determination of properties of ultrathin and very thin silicon oxide layers by FTIR and X - ray reflectivity

Kopani, Martin, Jergel, Matej, Kobayashi, Hikaru, Takahashi, Masao, Brunner, Robert, Mikula, Milan, Imamura, Kentarou, Jurecka, Stanislav, Pincik, Emil
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
1066
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1066-A07-03
Date:
January, 2008
File:
PDF, 83 KB
english, 2008
Conversion to is in progress
Conversion to is failed