Atomic layer deposition of epitaxial HfO2 thin films on r-cut sapphire
Mändar, Hugo, Rammula, Raul, Aidla, Aleks, Aarik, JaanVolume:
28
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2013.120
Date:
July, 2013
File:
PDF, 869 KB
english, 2013