Main Features of the Electron Kinetics in Collision...

Annalen der Physik 1985 Vol. 497; Iss. 4-6

Main Features of the Electron Kinetics in Collision Dominated Steady-State rf Plasmas

Dr. sc. R. Winkler, Prof. Dr. J. Wilhelm, A. Hess
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Volume:
497
Year:
1985
Language:
english
Pages:
22
DOI:
10.1002/andp.19854970421
File:
PDF, 1.12 MB
english, 1985
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