Surface texture and structure of ZnO films synthesized by off-axis sputtering deposition
Zhu, Shen, Su, C-H., Lehoczky, S. L., George, M. A., Lowndes, D. H.Volume:
15
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2000.0160
Date:
May, 2000
File:
PDF, 320 KB
english, 2000