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A double-stage pulsed discharge fluorine atom beam source
Ren, Zefeng, Qiu, Minghui, Che, Li, Dai, Dongxu, Wang, Xiuyan, Yang, XuemingVolume:
77
Year:
2006
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2140338
File:
PDF, 296 KB
english, 2006