Simulation of electrical properties in ion implanted GaAs

Physics Procedia 2009 Vol. 2; Iss. 3

Simulation of electrical properties in ion implanted GaAs

H. Ali-Boucetta, R. Bensalem, S. Alleg, A. Smith, R. Gwilliam, B. Sealy
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Volume:
2
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.phpro.2009.11.027
File:
PDF, 255 KB
english, 2009
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