Study of Pyrazole as Copper Corrosion Inhibitor in Alkaline...

ECS Journal of Solid State Science and Technology 2014 / 07 Vol. 3; Iss. 10

Study of Pyrazole as Copper Corrosion Inhibitor in Alkaline Post Chemical Mechanical Polishing Cleaning Solution

Goswami, A., Koskey, S., Mukherjee, T., Chyan, O.
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Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0011410jss
Date:
July, 2014
File:
PDF, 1.15 MB
english, 2014
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