Pulsed DC Magnetron Sputtered Rutile TiO2 films for next generation DRAM capacitors
Jithin, M.A, Kolla, Lakshmi Ganapathi, Bhat, Navakanta, Mohan, S., Morozumi, Yuichiro, Kaushal, SanjeevVolume:
1561
Year:
2013
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.823
File:
PDF, 557 KB
english, 2013