Non-melt Laser Thermal Annealing of Shallow Boron Implantation for Back Surface Passivation of Backside-Illuminated CMOS Image Sensors
AIT FQIR ALI-GUERRY, Zahra, HUET, Karim, DUTARTRE, Didier, BENEYTON, Rémi, BENSAHEL, Daniel, NORMANDON, Philippe, LU, Guo-NengVolume:
1321
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.808
Date:
January, 2011
File:
PDF, 293 KB
2011