Direct Local Strain Measurement In Damascene Interconnects

MRS Proceedings 2007 / 1 Vol. 990

Direct Local Strain Measurement In Damascene Interconnects

Kasbari, Moustafa, Rivero, Christian, Blayac, Sylvain, Cacho, Florian, Bostrom, Ola, Fortunier, Roland
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Volume:
990
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0990-B07-06
Date:
January, 2007
File:
PDF, 187 KB
english, 2007
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