Reactive nitrogen source based on ECR discharge sustained...

Japanese Journal of Applied Physics 2015 / 04 Vol. 54; Iss. 4

Reactive nitrogen source based on ECR discharge sustained by 24 GHz radiation

Vodopyanov, Alexander, Mansfeld, Dmitry
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.040302
Date:
April, 2015
File:
PDF, 702 KB
english, 2015
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