Interface structure of AlN/TiN/MgO(001) prepared by...

Interface structure of AlN/TiN/MgO(001) prepared by molecular beam epitaxy

Ma, X. L., Sugawara, Y., Shibata, N., Ikuhara, Y.
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Volume:
14
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1999.0634
Date:
December, 1999
File:
PDF, 337 KB
english, 1999
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