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Mechanisms for enhanced C54–TiSi2 formation in Ti–Ta alloy films on single-crystal Si
Quintero, A., Libera, M., Cabral, C., Lavoie, C., Harper, J. M. E.Volume:
14
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1999.0635
Date:
December, 1999
File:
PDF, 750 KB
english, 1999