Schottky Source/Drain Transistor on Thin SiGe on Insulator...

MRS Proceedings 2006 / 1 Vol. 913

Schottky Source/Drain Transistor on Thin SiGe on Insulator Integrated with HfO2/TaN Gate Stack

Gao, Fei, Lee, S.J., Li, Rui, Balakumar, S., Tung, Chih-Hang, Chi, Dong-Zhi, Kwong, Dim-Lee
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Volume:
913
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0913-D01-04
Date:
January, 2006
File:
PDF, 709 KB
english, 2006
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