Nano-scale Tribological Behavior of Polycrystalline Silicon...

MRS Proceedings 2008 / 1 Vol. 1085

Nano-scale Tribological Behavior of Polycrystalline Silicon Structural Films in Ambient Air

Alsem, Daan Hein, van der Hulst, Ruben, Stach, Eric A., Dugger, Michael T., de Hosson, Jeff Th. M., Ritchie, Robert O.
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Volume:
1085
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1085-T01-04
Date:
January, 2008
File:
PDF, 939 KB
english, 2008
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