Increasing the mean grain size in copper films and features

Journal of Materials Research 2008 / 3 Vol. 23; Iss. 3

Increasing the mean grain size in copper films and features

Vanstreels, K., Brongersma, S.H., Tokei, Zs., Carbonell, L., De Ceuninck, W., D’Haen, J., D’Olieslaeger, M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2008.0080
Date:
March, 2008
File:
PDF, 2.92 MB
english, 2008
Conversion to is in progress
Conversion to is failed