Intrinsic stress effects on the growth of planar SiO2 films

Journal of Materials Research 1999 / 12 Vol. 14; Iss. 12

Intrinsic stress effects on the growth of planar SiO2 films

Delph, T. J., Lin, M-T.
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Volume:
14
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1999.0612
Date:
December, 1999
File:
PDF, 127 KB
english, 1999
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