Fabrication of ordered Ta2O5 nanodots using an anodic...

Journal of Materials Research 2007 / 4 Vol. 22; Iss. 4

Fabrication of ordered Ta2O5 nanodots using an anodic aluminum oxide template on Si substrate

Yang, Ching-Jung, Chen, Chih, Wu, Pu-Wei, Shieh, Jia-Min, Wang, Shun-Min, Liang, Shih-Wei
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Volume:
22
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2007.0143
Date:
April, 2007
File:
PDF, 353 KB
english, 2007
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