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Ru/Ta Alloying Behavior and its Implications for Laminate Based CMOS Integration
Lisoni, Judit G., Schram, Tom, Witters, Thomas, Van Hoornick, Nausikaa, Yamada, Naoki, De Gendt, StefanVolume:
917
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0917-E08-04
Date:
January, 2006
File:
PDF, 866 KB
english, 2006