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A comparative study of radiofrequency antennas for Helicon plasma sources
Melazzi, D, Lancellotti, VVolume:
24
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/24/2/025024
Date:
April, 2015
File:
PDF, 4.12 MB
english, 2015