Expedient route to volatile zirconium metal-organic chemical vapor deposition precursors using amide synthons and implementation in yttria-stabilized zirconia film growth
Belot, John A., McNeely, Richard J., Wang, Anchuan, Reedy, Charles J., Marks, Tobin J., Yap, Glenn P. A., Rheingold, Arnold L.Volume:
14
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1999.0004
Date:
January, 1999
File:
PDF, 211 KB
english, 1999