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Oxidation of Ni-toughened nc-TiN/a-SiN x nanocomposite thin films
Zhang, Sam, Sun, Deen, Zeng, XiantingVolume:
20
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2005.0357
Date:
October, 2005
File:
PDF, 1.48 MB
english, 2005