Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition
Zemtsova, Elena G., Arbenin, Andrei Yu., Plotnikov, Alexander F., Smirnov, Vladimir M.Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4907989
Date:
March, 2015
File:
PDF, 1.85 MB
english, 2015