Stress and thermal expansion of β–SiC films by the...

Journal of Materials Research 1991 / 5 Vol. 6; Iss. 5

Stress and thermal expansion of β–SiC films by the vibrating-membrane method

Berry, B.S., Pritchet, W.C., Fuentes, R.I., Babich, I.
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Volume:
6
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1991.1061
Date:
May, 1991
File:
PDF, 437 KB
english, 1991
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