Thermodynamic analysis for the chemical vapor deposition of...

Thermodynamic analysis for the chemical vapor deposition of composite coatings from the Al–B–Ti–N–H–Cl–Ar system

Moss, T.S., Hanigofsky, John A., Lackey, W.J.
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Volume:
7
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1992.0754
Date:
March, 1992
File:
PDF, 966 KB
english, 1992
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