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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Improved Lower Electrode Oxidation of High-k TiCeO Metal-Insulator-Metal Capacitors by Using Dual Plasma Treatment
Cheng, Chun-Hu, Hsu, H. H., Deng, C. K., Chin, Albert, Chou, C. P.Volume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2981614
File:
PDF, 599 KB
english, 2008