Thermodynamics on Formation of Condensed Phases during CVD...

Advanced Materials Research 2011 / 2 Vol. 194-196

Thermodynamics on Formation of Condensed Phases during CVD Si3N4 Process with Sicl4-NH3-H2 Precursors

Deng, Juan Li, Cheng, Lai Fei, Hong, Zhi Liang, Su, Ke He
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Volume:
194-196
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.194-196.1516
Date:
February, 2011
File:
PDF, 354 KB
english, 2011
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