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Blasting of Affected Layer of Silicon Surface Sliced by Wire EDM
Hidai, Hirofumi, Sugita, Taro, Tokura, HitoshiVolume:
76-78
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.76-78.440
Date:
June, 2009
File:
PDF, 717 KB
english, 2009