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The Effect of Plasma Power on the Properties of Amorphous Silicon-Germanium Thin Films
Gu, Long, Yang, Hui Dong, Huang, BoVolume:
317-319
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.317-319.341
Date:
August, 2011
File:
PDF, 284 KB
english, 2011