Polycrystalline Silicon Layers with Enhanced Thermal...

Polycrystalline Silicon Layers with Enhanced Thermal Stability

Lysacek, David, Šik, Jan, Bábor, Petr
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Volume:
178-179
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.178-179.385
Date:
August, 2011
File:
PDF, 3.89 MB
english, 2011
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