Evaluation of Piezoelectric Properties of AlN Using MEMS...

Advanced Materials Research 2011 / 5 Vol. 254

Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators

Khine, Lynn, Wong, Lionel Y.L., Soon, Jeffrey B.W., Tsai, Ming Lin Julius
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Volume:
254
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.254.74
Date:
May, 2011
File:
PDF, 2.14 MB
english, 2011
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