The effect of substrate temperature and interface oxide layer on aluminum induced crystallization of sputtered amorphous silicon
Hossain, Maruf, Abu-Safe, Husam, Barghouti, Marwan, Naseem, Hameed, Brown, William D.Volume:
808
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-808-A4.22
Date:
January, 2004
File:
PDF, 112 KB
english, 2004