Excimer laser cleaning, annealing, and ablation of β–SiC
Pehrsson, Pehr E., Kaplan, RayVolume:
4
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1989.1480
Date:
December, 1989
File:
PDF, 1.16 MB
english, 1989