Study of Surface Charge Effects on Oxide and Nitride...

Electrochemical and Solid-State Letters 2004 Vol. 7; Iss. 12

Study of Surface Charge Effects on Oxide and Nitride Planarization Using Alumina/Ceria Mixed Abrasive Slurries

Hegde, Sharath, Babu, S. V.
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Volume:
7
Year:
2004
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1813231
File:
PDF, 197 KB
english, 2004
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