![](/img/cover-not-exists.png)
ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Application of Atmospheric Plasma for Low Temperature Wafer Bonding
Low, Yian Wei, Rainey, Paul, Baine, Paul, Montgomery, John, Mitchell, Neil S., McNeill, David W., Gamble, Harold, Armstrong, Brian M.Year:
2010
Language:
english
DOI:
10.1149/1.3375625
File:
PDF, 691 KB
english, 2010