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Surface Kinetics Model for SiLK Chemical Mechanical Polishing
Borst, Christopher L., Thakurta, Dipto G., Gill, William N., Gutmann, Ronald J.Volume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1431576
File:
PDF, 297 KB
english, 2002