Al-Free Nanolayered Metallization Systems for Sub-Micron...

Journal of Nano Research 2012 / 2 Vol. 17

Al-Free Nanolayered Metallization Systems for Sub-Micron HEMTs

Kolaklieva, Lilyana, Chitanov, V., Kakanakov, Roumen
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Volume:
17
Language:
english
Journal:
Journal of Nano Research
DOI:
10.4028/www.scientific.net/JNanoR.17.203
Date:
February, 2012
File:
PDF, 1.54 MB
english, 2012
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