Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering
Martin, N., Madjoud, H., Baretti, D., Rousselot, ChristopheVolume:
287-288
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.287-288.327
File:
PDF, 376 KB
1998