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Critical Adhesion Energy at the Interface Between Benzocyclobutene and Silicon Nitride Layers
Kwon, Yongchai, Seok, Jongwon, Lu, Jian-Qiang, Cale, Timothy S., Gutmann, Ronald J.Volume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2717504
File:
PDF, 584 KB
english, 2007