Effect of Different High-K Dielectrics on the Pt...

Effect of Different High-K Dielectrics on the Pt Nanocrystal Formation Statistics (size, density and area coverage) for Flash Memory Application

Misra, Abhishek, Sadana, Sunny, Suresh, Satya, Bhaisare, Meenakshi, Srinivasan, Senthil, Waikar, Mayur, Gaur, Amit, Kottantharayil, Anil
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Volume:
1288
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.208
Date:
January, 2011
File:
PDF, 457 KB
english, 2011
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