Recrystallization of Silicon on Insulator Layers Implanted...

Solid State Phenomena 2004 Vol. 95-96

Recrystallization of Silicon on Insulator Layers Implanted with High Doses of Hydrogen Ions

Tyschenko, I.E., Talochkin, A.B., Gutakovskii, Anton K., Popov, V.P.
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Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.23
File:
PDF, 1.44 MB
english, 2004
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